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The New PECVD Powerhouse from Oerlikon Solar

21 April 2010 | Oerlikon Solar Ltd., Trubbach
Oerlikon Solar’s next generation KAI MT equipment,the world’s first industry proven PECVD mass production system for thin film silicon PV absorbers capable of depositing the complete tandem pin-pin junction in one system. The major features of the new equipment are: a) more advanced film properties for the amorphous and microcrystalline absorber films and b) significant increase in overall productivity by 50% at a reduced footprint of 50%.