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Edwards’ Spectra Z 3000™

06 May 2009 | Edwards

Solar cell manufacturing is becoming increasingly important as an environmentally-friendly means of generating electrical power, and the growth of thin films of microcrystalline silicon will form a key part of this. The PECVD growth of this material poses a number of significant challenges regarding the treatment of the resultant exhaust gases, in terms of removing toxic, corrosive, global warming, and flammable gases safely, at low cost, whilst also minimising the environmental impact.